Determination of Activation Energy of Intermixing in Textured Metal-metal Multilayer Films via Two-dimensional X-ray Diffraction
نویسندگان
چکیده
Activation energies for the intermixing reaction of textured metal-metal multilayer thin films have been determined using x-ray diffraction analysis. Kinetic data were collected utilizing an area detector so as to reduce intensity bias from changes in out-of-plane texture during the intermixing reaction. Activation energies for Al/Pt, Ni/Ti, and Co/Al metal-metal multilayer thin films have been determined as 95.4(2) kJ/mol, 201(13) kJ/mol, and 247(19) kJ/mol, respectively.
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